An IO pad ESD protection circuit is composed of a SCR circuit, a first diode, a second diode, and an anti-latch-up circuit. A control unit samples a plurality of amplitude values of an acceleration signal during a predetermined unit period in the panning state or the tilting state. By skipping those added fields such as a tag header, the device can accommodate various future-defined standards without incurring additional engineering or design costs or compromising packet processing efficiency. For each channel waveguide of the plurality of channel waveguides the position and the width of the corresponding waveguide aperture and the angle and the shape of the waveguide transition structure are individually selected to capture a predetermined portion of the on-chip diverging optical beam. The electrodes are provided to a front surface and a back surface of the semiconductor thin film with the semiconductor thin film interposed therebetween.