Embodiments of the invention include a method of cleaning a semiconductor substrate of a device structure and a method of forming a silicide layer on a semiconductor substrate of a device structure. The non-reusable, locking sterilization container includes a tray, a lid, a permeable filter, a non-reusable lock and a frangible release that limit the container to only a single sterilization cycle or single use. In a further aspect the invention provides a fluid for use in a well within a subterranean formation penetrated by a wellbore. The valves may include at least two zone valves for communicating pressurized air into the object, and a vent valve for venting the object via the zone valves.