The invention relates to a basic self-routing unit for multicast. The drive circuit has a start circuit for dynamically increasing a current limiting level for the power switch during a start time after the switch-on instant of the switching regulator from an initially low level up to a current-limiting desired level at the end of the start time. The router may map the hash value of the packet to a forwarding element associated with a data path. Details of the forwarding location are obtained from the register. The antistiction bumps are prepared lithographically, by patterning an antistiction material prior to the assembly of the composite wafer. The separating pawl includes a pivotal portion integrally formed between the leading end portion and the tailing end portion, and the tailing end portion has a spring property capable of adjusting the press-contact force of the tip part.