Described herein are methods and systems for combination membranebiolytic filtration. The insulation layer has raised portions corresponding to the patterns. Diffusion control for USJ formation is demonstrated in conjunction with a boron or shallow boron cluster implant of the sourcedrain structures in PMOS. The method may further include creating bi-directional shadow ports in the interface, the shadow ports corresponding to the inout ports and output ports of the IC design, supplying expected responses to the shadow ports by executing the expected-response generator, sampling the expected responses from the shadow ports, and recording the sampled expected response. At least one electrode, dielectric layer, or carbon layer between an electrode and a neighboring member includes carbon. The steam ovens described may be designed so that they inject steam directly into the oven cavity, and in some instances, generate the steam directly in the oven cavity as well.