Modular floor tiles and modular floor systems are described herein. A drive circuitry layer is positioned on the substrate. The treatment can be controlled to permit regrowth of healthy microflora. The typical brush seal includes a front plate, a back plate, and a plurality of bristles sandwiched between the front plate and the back plate and having free radially extending ends disposed circumferentially about and contacting the rotating shaft. In some versions, the flexible member may engage and disengage the guard to retain and release the guard. The useful lifetime of microelectromechanical fluidic devices based on silicon fabrication is extended.