A method of making a micro electro-mechanical switch or tunneling sensor. The capillarity material has a free rise wick height of at least one half its longest dimension. The first and second mirror shells are rotationally symmetrical and concentrically arranged around a common axis of rotation, the first and second ring aperture sections do not overlap with one another, the first planar ring section substantially abuts the second planar ring section, and the first irradiance is approximately equal to the second irradiance.