1460970250-4802c815-4709-475d-8a2b-d1fb0da5c3dd

A method for forming through silicon vias in a silicon substrate is disclosed. The method can be used in the production of, for example, solar cells. A stem is attached to the throttling element. The remote control comprises a second actuator and a wireless transmitter operable to transmit the wireless control signal is response to an actuation of the second actuator.