The present invention provides a highly reliable charged beam gun designed in consideration for environmental protection, which prevents faulty insulation in a high-voltage connection. The X-axis scanning injector is movable in the X-axis direction to scan the first local plasma over the entire area of the wafer. If the vehicle is in straight line or curve driving and the vehicle speed is less than a speed threshold, the system determines that the vehicle is in an accelerating or decelerating maneuver.