The top-view profiles of repeating structures in a wafer are characterized and parameters to represent variations in the top-view profile of the repeating structures are selected. The transfer member has an endless shape. This prevents high energy light from inducing birefringence in optical elements arranged between the two polarization manipulators. The method may include a step of applying an electrical potential between the anode and the cathode sufficient to produce a first product recoverable from the first region and a second product recoverable from the second region.