1460990477-97861b62-559a-410d-91e7-12933aaf7173

A polishing pad for polishing a wafer or other article, the pad having a groove network configured to vary the residence time across the wafer track of the reaction products formed by the interaction of reactants in the polishing medium with structure on the wafer. The invention aims at enhancing the productivity of such a coating device. Examples of operating conditions include temperature, voltage, current, duty-cycle, etc.