There is provided an inexpensive sputtering apparatus in which self-sputtering can be stably performed by accelerating the ionization of the atoms scattered from a target. A grinding aid is added to the cement clinker before it is ground in. The adapter also includes a plurality of processors for processing one or more events generated by the plurality of functions. The plugs are formed in the corresponding stacked chips, and are electrically connected to the corresponding contact pads of two of the corresponding chips which are adjacent to each other, or two of the corresponding chips which are not adjacent to each other. The comparator may then generate a control signal that detects a change between the phase difference of the first and the second clock signal and an optimized phase difference based on an amplitude comparison between the integrated phase signal and the integrated first clock signal. The dispersion correction parameters are adjusted if the quality of the acquired image does not meet or exceed the quality metric for the acquired image.