A two-dimensional ultrasonic probe has a transmitting function of an ultrasonic signal without electric interconnection of a numerous number of microcomponents and without increase in crosstalk and electric impedance. The transfer station includes a portion for engaging a ground surface and for moving the transfer station relative to the ground surface. Nantoube articles are suspended over the void or form a bottom surface of a void. Application of the lubricant has also shown to improve gram load uniformity, reduce adverse distortion to the actuator assembly and reduces torque out retention values. The transistor further includes an etching stopper made of spin-on glass on a channel-forming region of the semiconductor layer. At least a component of the measuring unit is disposed in the first module and is electrically connected to the second module through the connection member.