An electronic device manufacturing apparatus is provided with a support which includes a shelf for supporting a substrate, a sensor which obtains the position of the substrate and a position correcting mechanism which corrects the position of the substrate. The rotary drive has a driven part rotated by the cam, and a drive part opposite to the driven part. The front section includes a cockpit located above a floorboard between a cockpit bulkhead to the rear and a front base to the front.