An object of the invention is to provide a substrate transport apparatus which enables prompt transfer of a substrate, and a substrate processing apparatus incorporating this. The intermediate layer may comprise an ethylene-alpha olefin copolymer and may comprise a copolymer of ethylene and octene. The ceramic heat sink monolith 24 includes a block 38 and an array of spaced apart posts 40 projecting outwardly from the block 38. A source region is in ohmic contact with the first electrode and arranged between the two vertical trenches. The receiver also has a storage module and interrupts the live recasting of the broadcast signal to spool out a locally stored file. The culture may also comprise an agent releasing oxygen, such as nitrate oxide.