A process of forming a nitride film on a semiconductor substrate including exposing a surface of the substrate to a rapid thermal process to form the nitride film. The system creates a security focused development infrastructure to augment existing planning tools, existing development environment, and provide analytics for adjusting the plans to carry out a secure distributed project development. The controller may control the opening and closing of the optical shutter and discharging of the amplification device so that the amplification device discharges when the pulsed laser light that has passed through the optical shutter passes through the amplification device.