A substrate processing method for a substrate processing system comprising at least a substrate processing apparatus that subjects a substrate to processing, and a substrate transferring apparatus having a transferring device that transfers the substrate, which enables the yield to be increased without bringing about a decrease in the throughput. Upon microarray production, samples are immobilized on a microarray support using all pins as controls for correcting the inter-pin spotting amount errors. In addition, each host further has an access device connected to a fault tolerant external memory unit by a fast connection. The blurred edge may be formed by the partially overlapping beams. Consequently, when a location update is occurring, for example, the HLR sends to the MSCVLR via a MAP operation both portions when the flag is set.