A device for fixing especially surface-like workpieces has a flexible attachment surface at least one holding device which holding devices may be embodied as spheres which are held in openings by an elastic surface-like component in a resilient manner. A semiconductor integrated circuit device of the present invention includes a drive circuit for driving a circuit block. After the physical address is available, the physical address is compared to a physical address tag value for the forwarded data to verify that the forwarded data is the correct data. In a further improvement, the horn is joined to an ultrasonic transducer through a booster block that provides an acoustic gain to the ultrasonic vibrations, and the booster block is plated with a reflective metal to lessen any loss of ultrasonic energy being transmitted to the horn. Thus, the correction of the phase shift between element arrays can be performed as precisely as possible and the reproducibility of a black fine line is increased. The third position permits rotation of the table with the spring loaded detent system being disengaged providing free movement of the table.