Laser modules using two-dimensional laser diode arrays are combined to provide an intense laser beam. The wireless system also includes a decoder configured to decode the spinal code. The apparatus estimates cylinder intake-air quantity KLfwd at a future point in time later than a present point in time based on the estimated pressure and the estimated temperature of air within the intercooler. The driver is configured to drive the mechanical cantilever to perform an oscillatory motion. The temperature-sensitive metal substrate is coated with an intermediate layer of a polyalkyleneimine, heated to polymerize the imine, and then coated with an epoxy containing powder coating. A protuberance is formed on an inner surface of the one surface-side wall facing the innermost region, for engagement with the foremost end of the spring member.