In a plasma enhanced physical vapor deposition of a material onto workpiece, a metal target faces the workpiece across a target-to-workpiece gap less than a diameter of the workpiece. A plurality of cooling plates having a uniform thickness of 1 millimeter or less over the entire surface area of the cooling plates are mounted onto the body of the diode plate. The gate may include a gate dielectric overlying the channel and a gate electrode overlying the gate dielectric. The wheel speed sensor is configured to sense a speed of a wheel of the vehicle. The development tool transmits messages formatted based on a client-side communications library defining communications with the hub module.