There is disclosed a CMP slurry which comprises a solvent, abrasive grains, and a silicone-based surfactant having an HLB value ranging from 7 to 20. A statement in intermediate code indicating the conversion of the object from the source class to destination class is identified. Also disclosed herein are apparatuses having a plurality of processing stations contained within one or more reaction chambers and a controller with machine-readable instructions for staggering the dosing of first and second substrates at first and second processing stations. Accordingly, the multi display device is easy to grasp for the user while providing the foldingfolding convenience. The terminal sends the returned password to the commercial service system.