A new hybrid method of fabricating optical micro electro mechanical system devices is disclosed that uses both bulk and surface micromachining techniques, and a new optical MEMS device is also disclosed that is fabricated using the new method. More specifically, the disclosed devices include a film defining a periodic array of surface elements so as to give rise to surface plasmon polaritons. In another embodiment, the seed is a transgenic seed having at least one heterologous gene encoding for the expression of a protein having pesticidal activity against a first pest and the composition has activity against at least one second pest. The zeotropic mixture working fluid is then condensed, subcooled, and collected for recirculation and recompression.