1459829670-7971dccf-2831-43fe-98d7-37f50cc4308f

A 2-dimensional interleaving method is disclosed. The invention includes a circular frame with attached legs to grip the sensor during transport and recovery. Residual charge is removed by applying a reverse polarity discharging DC voltage to an electrode embedded in an electrostatic chuck supporting the wafer, and providing an outlet to the residual charge to ground via a lift pin assembly. Accordingly, since a plurality of LPA types can be supported with one LPA shelf, it is possible to prevent service from being stopped and prevent the waste of time, cost and human resources due to the replacement of equipment. Methods to identify such inhibitors are also disclosed. By dynamically adjusting cylinder-specific assignment of the knock sensors for knock detection and pre-ignition detection based on operating conditions of each cylinder, knock and pre-ignition is more reliably identified and distinguished.