An alignment processing mechanism 10 according to the present invention includes: a conveying mechanism 11 for conveying a substrate W to be processed, an alignment mechanism 12 for aligning the substrate W conveyed by the conveying mechanism 11 to a predetermined direction, and a buffer mechanism 13 for relaying the substrate W from the conveying mechanism 11 to the alignment mechanism 12. Use of biomass-derived polyols such as diols, triols, or mixtures thereof, optionally with a conventional grinding aid, cement quality improver, andor hexavalent chromium reducer, are believed to provide less risk of sludging when compared to glycerides obtained from fossil fuel sources. Without providing any protective layer overlying the second dielectric in the first region, an additional thermal oxidation step is performed without oxidizing the nanocrystals. A ring shaped insulator is deposited on the sidewall and between the substrate and the first conductive layer.