Provided are compounds of the formula :or a stereoisomer, tautomer, salt, hydrate or prodrug thereof that modulate tyrosine kinase activity, compositions comprising the compounds and methods of their use. A method of producing a device including the steps of coating a surface of a V-groove substrate with a reflective material, placing a light source in said V-groove substrate. The microwave dispersing system can include one or more moving reflectors for rastering microwave energy emitted from the split launchers. The power connector also includes a power contact that is held within the housing cavity. The ITO film 50 and the MoCr film 100 are dry-etched after having formed the ITO film 50 and the MoCr film 100.