An apparatus for forming a beam of energetic particles and for scanning the beam of particles with respect to an inspected object. Between each slot machine and the transfer link is a device that provides a multichannel link including a first main channel connecting to the central processing unit via the network data transfer link, a second main channel connecting to the slot machine, and a secondary channel connecting to the value unit transfer element. In the plug part, at least one flow channel is provided having at least one inlet opening and at least one outlet opening, in the at least one flow channel at least one sensor is accommodated for determining the at least one parameter. The anchor assembly is electrically conductive such that the switching signal generates an electrostatic force between the anchor assembly and the first electrode assembly. Such a module can implement a change in the module’s configuration or operating characteristics. The film can exhibit a density between 0.