A Temperature Swing Adsorption method for separating a first component, comprising a more adsorbable component, from a feed stream comprising more than 50 mol % of a second component, comprising a less adsorbable component, is provided. Suppressed to \xb11% or less an on-plane distribution in thickness of a resist film to be applied onto a substrate in a graytone mask producing process. of at least 30 KJm2 when measured according to ISO 1801A is disclosed. The detector recognizes the sizes and numbers of the first and second particles and outputs first and second recognition signals.