A piezoelectronic device and a method of fabricating the same are provided. The patterning device is configured to pattern a beam of radiation according to a desired pattern. The filter includes a liner phase diffraction grating having unit cells which are disposed in a regular pattern at a grating pitch P and are formed by equal-width recesses and equal-width protrusions adjacent to each other. A spring is disposed within the ink accommodating portion between the case and the flexible film member, the spring forcing the flexible film member outward. The base sub-assembly includes a base surface over which the puck moves, a position detector that measures the position of the puck in the puck field of motion, and an attachment mechanism.