A coil for generating a high-frequency magnetic field is provided in a heating roller. The basic chip F has a memory capacity of i-mega bytes. Each of two clamping pads mounted on the body is moved to press against a first lateral wall of one of the guide rails to abut a second lateral wall of each guide rail against the first lateral surface, aligning the first lateral walls of the guide rails and aligning the second lateral walls of the guide rails. The source contact electrode contains aluminum and titanium in a region including an interface with the SiC wafer.