1459840602-d9fa4778-612f-447b-b0d6-a3dc1083aeb0

The temperature of a plasma chamber of a semiconductor fabrication tool is maintained substantially constant utilizing a variety of techniques, separately or in combination. The lighting system includes: a metal halide lamp having an arc tube housed within an outer tube; and a lamp. In particular embodiments, the second member is attached to the first member at either of the second end or between first and second ends of the first member.