1459843874-d1d0ec9b-f633-4b02-9020-3b2788e1c8e6

A capacitive acceleration sensor includes a supporting substrate, a movable member, and two fixed members. The systems and methods include selecting a set of parameters comprising a block length, a plurality of weight metrics, and a threshold, and estimating a Markov distribution associated with the selected set of parameters from a plurality of data blocks defined by the selected parameters. A mask generation procedure transforms a selected design layer into a mask for fabrication of a physical layer. The at least one error signal is used for estimating remaining symbols to be demodulated and for refining the estimated multipath propagation impairment.