An optical inspection system is provided for inspecting a workpiece including a feature to be inspected. A first polymer layer is formed on the passivation layer, a patterned first under barrier metal layer formed on the chip pads and the first polymer layer, a plurality of redistribution pattern formed on the first UBM, with each redistribution pattern having a concave pattern in a bump pad area. The novel separatorelectrolyte comprises a nanoparticulate metal oxyhydroxide, preferably AlOOH and a salt which are mixed and then pressed together to form a monolithic metal oxyhydroxide-salt membrane. 25 to 24 hours while increasing the oxygen concentration stepwise or continuously from an initial value of from 0. The column predicates are evaluated for those of the queries in a given one of the scan groups in accordance with a scheduling scheme. That public key can subsequently be used to authorize additional key servers.