An information display device which is structured as an electronic book with liquid crystal displays which display information stored in a storage medium. A semiconductor manufacturing apparatus comprises a load-lock chamber 1 in which substrate exchange with the outside is performed, a wafer process chamber 2 in which the wafer is subjected to a predetermined processing, and a transfer chamber 3 in which the wafer is transferred between the load-lock chamber 1 and the wafer process chamber 2. A mounting portion extends from a body of the cup and mounts the cup with respect to a cylinder head.