A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. A plug has a tapered cylindrical shape with a minimum cross-section that is less than a body plug region open cross-section of the assembly, and a maximum cross-section that is greater than the body plug region open cross-section. The calibration circuit is operative for performing a calibration process which adjusts the intensity of the light beam emitted by the light source such that the intensity is slightly greater than the light-state threshold of the photoelectric sensor. The flip flops are connected to wiring and are arranged to test connections in the wiring. A number of differences is calculated between the ending version and the beginning version. Also, a method of producing the modified enzymes is provided.