1459849011-dc28ea4b-8581-4361-be90-68f3bcf42173

Methods and systems for evaluating and controlling a lithography process are provided. Attributing to parallel processing method and structure, it processes a discrete wavelet transform coefficient at a clock cycle without any state variable stored. The recording unit is provided with at least one first receiving portion engaging with the first engaging portion formed for the first snap fitting, and at least one second receiving portion engaging with the second engaging portion formed for the second snap fitting.