The disclosure describes an economical and environmentally benign method for using crystalline silicon metal kerf recovered from wiresaw slurries towards the fabrication of complex MEMS and MEMS components, including MEMS packages, with improved design features. In the enhancing conversion section, the image data is subjected to enhancing conversion, so that optical characteristics of a liquid crystal display panel is corrected. The pattern generation unit connects to the transceiver. A third GaN layer is formed on the second GaN layer.