An alignment film material according to the present invention includes: a precursor of a first polyimide ; a second polyimide and a precursor thereof; and a vinyl-type monomer. In a proxy server 9300 for executing a protocol converting process in a network system, whether or not another protocol converting apparatus for executing a predetermined protocol converting process does not exist on the network is searched. An impedance circuit is disposed between the first mixer and the second mixer to decouple the channels. The transducer further includes a plurality of semi-conductor supports and tangential arms extending from the diaphragm edge for connecting the periphery of the diaphragm to the supports. Also, a method for detecting particles in an EUV lithography apparatus includes: producing a light area for illuminating the particles present in the gas phase, detecting radiation scattered at the illuminated particles in a test region, and determining a number of particles in the test region on the basis of the detected radiation.