In a method of generating andor executing a diversified program flow from a program source code for or on at least two processing units of a machine tool, production machine or robot, a machine code is generated from a program source code by a compiler for at least one processing unit with a programmable processing module. The method comprises at least performing an exposure process to a substrate having a photoresist pattern and performing a post-exposure bake process for activating the surface of photoresist pattern. The coupling washer is movable between a coupling configuration, in which the translation of the shaft relative to the forearm is locked, and an operating configuration, in which the translation and rotation of the shaft relative to the forearm are freed by a first electromagnet. The sealing element is formed by a shrink tube into which the activated carbon molded body is shrunk and which is shrunk sealingly on to the connection elements. An automatic shut-off assembly is operable in conjunction with the switch assembly to turn the switch to an off position in the event that the level of liquid within the tank rises beyond an acceptable level.