The present invention discloses a semiconductor device and a manufacturing method thereof which improves its characteristics even though it is miniaturized. The system includes a Network Routing Element, a Service Broker, at least a primary media severs and at least a secondary MS, a plurality of application servers and a plurality of border elements, all of which are coupled to the CCE. The connector is configured and arranged to pivotally interconnect the first stop and the second stop. By measuring an oscillating frequency of the oscillating circuit at this time, a change in the size of a variable capacitance formed between the movable electrode and the fixed electrode is detected, and thereby the positional displacement of the pendulum member is detected. A gate stack is formed over a portion of the first doped region, a portion of the second doped region, and the third doped region. A shroud circumferentially surrounds the center body for at least a portion of the length of the center body.