1459854222-762e97a4-f172-4149-aeb7-f225afe21b97

An ion beam tuning method, system and program product for tuning an ion implanter system are disclosed. By using a silicon nitride based cutting tool insert at a cutting speed of more than 1000 mmin, an unexpected increase in tool life has been obtained. The AD converters have a first operation mode in which they operate with a first number of conversion bits and at a first conversion speed and a second operation mode in which they operate with a second number of conversion bits and at a second conversion speed.