A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. A device for ultrasonic testing of a test piece includes a pressure vessel having an elastomeric diaphragm and an ultrasonic probe disposed within the pressure vessel. The components define aligned passages through which a locking pin extends to retain the components together. The portability of the vapor detection instrument testing system results in more frequent instrument testing and less detection instrument down time. Methods of forming a MESFET include providing a layer of silicon carbide, forming spaced apart source and drain regions in the silicon carbide layer, implanting impurity atoms to form a channel region between the source and drain regions, annealing the implanted impurity atoms, and forming a gate contact on the silicon carbide layer. The lightweight protocol utilizes messages that include header, trailer, and payload elements, where the payload element is optimized for the transmission of SOAP content as a default content type, but is capable of transmitting other types of non-SOAP MIME content as well.