A class E power amplifier circuit comprising an active device, a DC blocking element and an oscillating element, wherein the oscillating element is driven by a voltage signal. The bath composition may comprise sulfuric acid of 2 to 40% by volume, hydrofluoric acid of 10 to 18% by volume and acetic acid of 42 to 62% by volume. At some point after extrusion, at least one of the multilayer films are aged for a time and at a temperature in accordance with at least one member selected from the group consisting of: 141\xb0 F. After that, a light shielding layer is formed on the passivation layer to define a unit area.