1459855280-9d1c7d78-b8d8-4226-9bed-ae0ce0e9e7de

A method and apparatus for printing a redundant code on an elongate article are disclosed. In accordance with the present invention, in the EUV light source apparatus, the debris emitted together with EUV light from plasma generated by exciting a target within a chamber by a laser beam is prevented from adhering to an optical element provided within the chamber and forming a metal film. A black matrix material is disposed adjacent to the light guides proximate to the magnifying output ends.