A conductive material is provided to an open end of a penetrating hole penetrating through at least a semiconductor element, on the side of a first surface of the semiconductor element. In one aspect, a nebulizer is pressure sensitive so that nebulization is coordinated with a breathing cycle of the patient. The ability to use flexible polymers to form the polymeric replica facilitates industrial-scale processes utilizing the highly-ordered block copolymer films. For in-line lead IC packages, a common cushion can be used for each line of leads. A receiver, coupled to the link interface, is to receive second error-detection information corresponding to at least the portion of the write data.