A computer system implements a memory allocator that employs a data structure to maintain an inventory of dynamically allocated memory available to receive new data. The particular position of the shower head, and the direction of the shower spray, can be modified by re-configuring the shape of the shower arm. The anti-inflammatory agents are selected from the group consisting of Sanglifehrin A, Sanglifehrin B, Sanglifehrin C, Sanglifehrin D, and pharmaceutically acceptable derivatives thereof. This suppresses influence to devices and members in the periphery of the substrate caused by leakage of the liquid forming a liquid immersion area, thereby realizing satisfactory exposure processing.