This device comprises a sprayer and a reservoir for feeding the sprayer with fluid. To remove the pollutants adhered to a lens disposed at the upper end of a projection optical system, a cylindrical protecting member is disposed through the openings in a reticle stage and a reticle base. A storage device access request is received from the host device and at least one state field value in the extent record is changed in response to the access request from the host device. A guide, one of a plurality, fits snugly in the opening. The algorithm then calculates a delivery head value based on the pressure loss value, the fluid density and a gravitational acceleration.