A mass flow controller, a method for calibrating an MFC, and a method for operating an MFC are disclosed. The directories may be managed using Byzantine-fault-tolerant groups, whereas files are managed without using Byzantine-fault-tolerant groups. The pressure elements are formed on the first part of a housing which is movable with respect to the second part thereof provided with spacing elements defining a supporting surface in such a way that the first part of the housing is fixed at a certain distance from the substrate.