A method of manufacturing semiconductor devices is disclosed. In addition, the plasma is generated from a processing gas at least including a first fluorocarbon gas which is an unsaturated gas; a second fluorocarbon gas which is an aliphatic saturated gas expressed by CmF2m+2 ; and an oxygen gas. A cold circuit extracts the cold from the second heat exchanger and a hot circuit extracts the heat from the first heat exchanger. The device is preferably a device implantable in the human eye. The present invention also relates to use of such compositions to provide improved surface conditioning effects and reduced metal astringency.