Some embodiments include integrated circuits having first and second transistors. A plasma is formed in the plasma chamber with the dopant heavy halogenide compound gas and generates desired dopant ions and heavy fragments of precursor dopant molecule. The second elongate guide device is oriented substantially parallel to the surface of the wall element and moves along the first elongate guide device. Furthermore, e-mail, e-commerce, and e-business transactions can include interactive advertising, promotional offers, coupons, and supporting other remote data communications. A UV transparent cooling medium is passed through the space between the tube and the bulb to provide cooling for the apparatus, preventing heat damage from the bulb.