The present invention generally provides apparatus and method for forming a clean and damage free surface on a semiconductor substrate. The oral bioavailability of the active compounds in the pharmaceutical compositions of the present invention is surprisingly high. Each guide grid possesses an adjustable grid geometry. Similarly, the valve members are jointly moved into engagement with the valve seat before the cross over nozzle is separated. The present invention provides an anisotropic semiconductor film on a substrate, comprising at least one solid layer of material that comprises predominantly planar graphene-like carbon-based structures and possesses anisotropy of conductivity, and wherein the layer thickness is in a range from approximately 5 nm to 1000 nm.