1459885072-535cc491-8ee1-4228-b594-44b03e235bd8

A method of controlling a chemical mechanical polishing system in which an inner tolerance, an outer tolerance and a specification tolerance limit are received by a control system. A coupler releasably couples the upper faucet assembly to the mounting base. The test vectors are processed with the hardware using a free-running clock, for example to speed up test time and to generate information related to operational speed. As a result, the functionality of the legacy application may be migrated to a new platform and architecture and the legacy application decommissioned so that organizations may continue to realize a return on their significant investment in the creation of the legacy application. A slot extends around the beam for allowing the beam to flex. The second electrode provides a second capacitance signal that is used to compensate for changes in capacitance between the diaphragm and the first electrode caused by temperature changes.